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Application of pulse power supply for diamond coatings deposition in glow discharge plasma

Application of pulse power supply for diamond coatings deposition in glow discharge plasma

Comparative studies of diamond coatings deposition have been carried out in the glow discharge plasma stabilized by a magnetic field in methane-hydrogen medium with using the DC or pulse power supply. It was shown that using of a pulsed power supply leads to an increase of the input power range at w...

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Bibliographic Details
Main Authors: Koshevoy, K.I., Volkov, Yu.Ya., Strel’nitskij, V.E., Reshetnyak, E.N.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
Series:Вопросы атомной науки и техники
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/194829
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http://dspace.nbuv.gov.ua/handle/123456789/194829

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