Ignition and properties of RF capacitive discharge in acetylene

• Дата: 2019
• Автори: Lisovskiy, V.A., Dudin, S.V., Platonov, P.P., Bogatyrenko, S.I., Minenkov, A.A.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Назва видання: Вопросы атомной науки и техники
• Теми: Gas and plasma-beam discharges and their applications
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/195195
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Ignition and properties of RF capacitive discharge in acetylene / V.A. Lisovskiy, S.V. Dudin, P.P. Platonov, S.I. Bogatyrenko, A.A. Minenkov // Problems of atomic science and technology. — 2019. — № 4. — С. 135-140. — Бібліогр.: 41 назв. — англ.

In the present work, we measured breakdown and extinction curves of radio-frequency discharge in acetylene as well as dependences of active current, power and gas pressure on the discharge burning time, and also optical emission spectra. It was found that in the region of low acetylene pressures (to the left of the minimum of the breakdown curve), the discharge can cover only a part of the electrode surface. Immediately after the ignition of the discharge, due to the intense deposition of the polymer film and the formation of dust particles in the plasma volume, the gas pressure decreases sharply (by the factor of 2-5), while the active current and power increase and then reach saturation. In the discharge with intense polymerization, the lines of atomic and molecular hydrogen dominate in the emission spectrum of the discharge. The film deposited on the surface of the electrodes and the tube walls, as well as the dust particles formed, are amorphous, the maximum peak of XRD spectrum is observed at 2θ = 18°, and the light absorption by the deposited films is highest at 440 nm wavelength.