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2025-02-22T17:02:50-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-195391%22&qt=morelikethis&rows=5
2025-02-22T17:02:50-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T17:02:50-05:00 DEBUG: Deserialized SOLR response
Vector proton beam writing system

Vector proton beam writing system

Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused beam size and shape are measured by scanning standard copper mesh for e-bea...

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Bibliographic Details
Main Authors: Polozhii, H.E., Ponomarev, A.G., Kolinko, S.V., Rebrov, V.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
Series:Вопросы атомной науки и техники
Subjects:
Interaction of relativistic particles with crystals and matter
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/195391
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http://dspace.nbuv.gov.ua/handle/123456789/195391

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