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Non-destructive control of PVD coating surface defects

Non-destructive control of PVD coating surface defects

Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating with an fcc lattice and (111) texture is formed. Theoretical studies are carr...

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Bibliographic Details
Main Authors: Romaniuk, S.P., Bilinska, M.S., Taran, A.V., Klochko, O.Yu., Nowakowska-Langier, K., Marchenko, A.K., Deryabkina, E.S., Nikolaychuk, G.P.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
Series:Problems of Atomic Science and Technology
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/195907
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http://dspace.nbuv.gov.ua/handle/123456789/195907

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