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Back-scattering and neutralization coefficients of nitrogen ions on iron surface
The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The...
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Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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Series: | Problems of Atomic Science and Technology |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/195913 |
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