Back-scattering and neutralization coefficients of nitrogen ions on iron surface
The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The...
Збережено в:
| Дата: | 2022 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
|
| Назва видання: | Problems of Atomic Science and Technology |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/195913 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Back-scattering and neutralization coefficients of nitrogen ions on iron surface / A. Kuzmichev, M. Melnichenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 129-133. — Бібліогр.: 12 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The ion energy was from 0.1 to 70 keV. The ions N+ are considered to be back-scattering in the form of energetic N atoms. The calculations showed the back-scattering and neutralization coefficients are tens of percent for low energies N⁺ ions and several percent for energies of tens kiloelectron-volts. The average penetration depth of the ions into the Fe target and the ion sputtering coefficients are calculated, too. |
|---|