Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge
The paper presents a method for the formation of low-energy ion flow for creation and treatment of functional coatings without radiation damage. Plasma source based in arc discharge with filament cathode creates the primary plasma in the volume of vacuum chamber where the treated sample is placed. T...
Збережено в:
| Дата: | 2023 |
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| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Назва видання: | Problems of Atomic Science and Technology |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/196047 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge / Ya. Hrechkо, Ie. Babenko, I. Sereda , N. Azarenkov // Problems of Atomic Science and Technology. — 2023. — № 1. — С. 47-50. — Бібліогр.: 7 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The paper presents a method for the formation of low-energy ion flow for creation and treatment of functional coatings without radiation damage. Plasma source based in arc discharge with filament cathode creates the primary plasma in the volume of vacuum chamber where the treated sample is placed. The formation of low-energy ion flow takes place in the layer of space charge near the samples surface. The behavior of the ion current density depending on the potential drop in the layer has been studied for various experimental parameters and conditions. The sample surface treatment by low-energy ion flow has been also evaluated. |
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