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Modeling of the substrate cooling system in the installation for the deposition of coatings by the gas plasma method
The efficiency of diamond coating synthesis depends on both the parameters of the plasma flow and the uniform temperature distribution on the surface of the substrate on which the coating is synthesized. Mathematical modeling of the substrate cooling system in the installation for the deposition of...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Series: | Problems of Atomic Science and Technology |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/196143 |
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