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Plasma treatment of titanium dioxide film for black TiO₂

Plasma treatment of titanium dioxide film for black TiO₂

The results of the treatment of TiO₂ film in volume discharge with an Ar/H₂ mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.

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Bibliographic Details
Main Authors: Frolova, E.K., Khomych, V.O., Kravchuk, R.M., Kolomys, O.F., Gudenko, Yu.M., Pylypchuk, O.S., Styopkin, V.I., Dobrovolskiy, A.M.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
Series:Problems of Atomic Science and Technology
Subjects:
Applications and technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/196201
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http://dspace.nbuv.gov.ua/handle/123456789/196201

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