2025-02-23T00:33:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-78239%22&qt=morelikethis&rows=5
2025-02-23T00:33:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-78239%22&qt=morelikethis&rows=5
2025-02-23T00:33:01-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T00:33:01-05:00 DEBUG: Deserialized SOLR response
ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate

ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate

Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness of 0.75 µm deposited at the magnetron power 130 W and 4 µbar argon pressure...

Full description

Saved in:
Bibliographic Details
Main Authors: Boyko, B.Т., Khrypunov, G.S., Yurchenko, G.V.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
Series:Вопросы атомной науки и техники
Subjects:
Пленочные материалы и покрытия
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/78239
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

http://dspace.nbuv.gov.ua/handle/123456789/78239

Similar Items