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Magnetically filtered vacuum-arc plasma deposition systems
This article is a brief historical review of R&D carried out by the KIPT scientists in the field of magnetic filtering of vacuum-arc plasma flows to be applied in thin film deposition technology.
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2002
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/79281 |
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