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Ion source of reactive gases with decreased neutral gas inleakage

Ion source of reactive gases with decreased neutral gas inleakage

Ion source with an original system of ions extraction from the discharge chamber, allowing more then on order of magnitude reducing of neutral gas incoming to the chamber of ion beam acceleration and use is described. The parameters of a received beam of nitrogen ions and possible variants of the so...

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Bibliographic Details
Main Authors: Lymar, A.G., Martynenko, P.A., Pоpоv, V.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
Series:Вопросы атомной науки и техники
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/79778
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http://dspace.nbuv.gov.ua/handle/123456789/79778

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