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The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges

The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges

The erosion process was investigated of TiN coatings which were made with the vacuum-arc sputtering of Ti at the different nitrogen pressures (10⁻⁴…5•10⁻³ Torr). The erosion rates were measured by the weighting on analytical balance before and after treatment by plasmas of magnetron type, axial symm...

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Bibliographic Details
Main Authors: Glazunov, G.P., Andreev, A.A., Sobol, O.V., Bondarenko, M.N., Konotopskiy, A.L., Stolbovoy, V.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
Series:Вопросы атомной науки и техники
Subjects:
Динамика плазмы и взаимодействие плазма-стенка
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/81201
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http://dspace.nbuv.gov.ua/handle/123456789/81201

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