The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges

• Дата: 2014
• Автори: Glazunov, G.P., Andreev, A.A., Sobol, O.V., Bondarenko, M.N., Konotopskiy, A.L., Stolbovoy, V.A.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
• Назва видання: Вопросы атомной науки и техники
• Теми: Динамика плазмы и взаимодействие плазма-стенка
• Онлайн доступ: http://dspace.nbuv.gov.ua/handle/123456789/81201
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges / G.P. Glazunov, A.A. Andreev, O.V. Sobol’, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2014. — № 6. — С. 76-79. — Бібліогр.: 10 назв. — англ.

The erosion process was investigated of TiN coatings which were made with the vacuum-arc sputtering of Ti at the different nitrogen pressures (10⁻⁴…5•10⁻³ Torr). The erosion rates were measured by the weighting on analytical balance before and after treatment by plasmas of magnetron type, axial symmetrical discharges in nitrogen atmosphere, at the temperatures of 500…1100ºС. It was shown that an erosion rate of TiN coatings deposited at low pressures (~10⁻⁴ Torr) is essentially (up to 1.5 times) lower than that for coatings produced at the more high pressures (5•10⁻³ Torr). For samples produced in the regime with high voltage pulses supply on substrate the erosion is lower than for coatings deposited in the regime without pulses supply. Taking into account the results of X-ray diffraction measurements, the physical mechanisms are suggested to explain such character of erosion behavior.