Modified helicon discharge excited by a linear inductive antenna
A new modification of the helicon discharge capable of producing linearly uniform plasma is investigated. The discharge is excited in magnetic field by an inductive antenna consisting of two parallel linear conductors with antiphase RF currents, similar to a two-wire transmission line. The wave natu...
Збережено в:
| Дата: | 2014 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/81951 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Modified helicon discharge excited by a linear inductive antenna / A.G. Borisenko, M.A. Beloshenko, V.F. Virko, Yu.V. Virko, V.M. Slobodyan // Вопросы атомной науки и техники. — 2014. — № 6. — С. 153-156. — Бібліогр.: 4 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | A new modification of the helicon discharge capable of producing linearly uniform plasma is investigated. The discharge is excited in magnetic field by an inductive antenna consisting of two parallel linear conductors with antiphase RF currents, similar to a two-wire transmission line. The wave nature of the discharge is demonstrated. It is shown that there exist some discharge conditions in which plasma density is homogenous along a significant part of the antenna length. A convenient for realization discharge system with the linear antenna immersed into plasma is proposed. Provided further improvement this discharge may be used for uniform plasma processing of large surfaces. |
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