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Development and application of metal contacts on polycrystalline diamond films using combination of HF and arc plasma sources

Development and application of metal contacts on polycrystalline diamond films using combination of HF and arc plasma sources

In this paper, the technology of application of ohmic contacts using arc discharge assisted by HF field was developed for semiconductor radiation detectors production. Polycrystalline diamond material for production of detectors was synthesized by chemical vapor deposition method (CVD) in NSC KIPT....

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Bibliographic Details
Main Authors: Muratov, R.M., Vierovkin, A.A., Kutny, V.E., Nezovibat’ko, Yr.N., Rybka, A.V., Taran, V.S.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
Series:Вопросы атомной науки и техники
Subjects:
Низкотемпературная плазма и плазменные технологии
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/81960
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http://dspace.nbuv.gov.ua/handle/123456789/81960

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