Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma
The growth of forest of single-walled carbon nanotubes (SWCNTs) in plasma-enhanced chemical vapor deposition (PECVD) is studied using a deposition model. The inhomogeneity in deposition of neutrals from plasma on the SWCNTs, which is typical for growth of the nanostructures in PECVD, is accounted fo...
Збережено в:
| Дата: | 2015 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/82147 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma / G.P. Burmaka, I.B. Denysenko, N.A. Azarenkov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | The growth of forest of single-walled carbon nanotubes (SWCNTs) in plasma-enhanced chemical vapor deposition (PECVD) is studied using a deposition model. The inhomogeneity in deposition of neutrals from plasma on the SWCNTs, which is typical for growth of the nanostructures in PECVD, is accounted for. It is investigated how the growth rate and the residence time of carbon atoms on SWCNT surfaces depend on the SWCNT length and the decay length characterizing deposition of neutral fluxes on the SWCNTs. The obtained results can be used for optimizing the synthesis of related nanoassembles in low-temperature plasma-assisted nanofabrication. |
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