Efficiency of the nitriding process in glow discharge plasma

• Main Authors: Zhovtyansky, V.A., Nazarenko, V.G., Khomych, V.O., Ryabtsev, A.V., Anisimova, O.V., Nevzglyad, I.O., Shnyt, O.Ya.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
• Series: Вопросы атомной науки и техники
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/90886

The problem of determination of the content of atomic nitrogen in glow discharge plasma in a nitrogen-argon mixture is considered. The discharge in this mixture is widely applied in the technologies of metal`s surfaces modification and the atomic nitrogen is responsible for the efficiency of this technologies. Influence of mixture composition on the rate constant of dissociation of molecular nitrogen, accountable for producing of atomic nitrogen is determined by simulation way, and parameters of plasma – from an experiment, on the basis of measuring by double probes. A function of distribution of electrons on energies was founded by numerically integrating the Boltzmann equation. The last one was written in the binomial approaching for mixture of molecular nitrogen and argon. The differences between proposed and fluid models are briefly discussed.