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Erosion of vacuum-arc TiN coatings in plasma of stationary magnetron-type discharges

Studies were made into erosion of titanium nitride coatings deposited onto stainless steel substrates in two different ways of vacuum-arc technology: with and without feeding high-voltage negative pulses on the substrate. A possible physical mechanism is offered and discussed to explain the differ...

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Bibliographic Details
Main Authors: Glazunov, G.P., Andreev, A.A., Bondarenko, M.N., Konotopskiy, A.L., Stolbovoy, V.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2011
Series:Вопросы атомной науки и техники
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/90894
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