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2025-02-22T16:01:11-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-90952%22&qt=morelikethis&rows=5
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Dynamic of wall currents in pulse plasma diode in tin vapor
In the paper the level of high-current pulse discharge plasma influence on the chamber wall is carried out, that is important for position choosing of the nanolithographer first collecting mirror with gas-discharge radiation source. In the high-current pulse discharge in tin vapor the dynamic of w...
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| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/90952 |
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