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Optimization of the plasma electrostatic filter using Taguchi method
We investigated the flow of carbon and metal vacuum arc plasma, produced in DC discharge with superimposed high-current arc pulses, through the electrostatic filter. The dependence of the filtering efficiency and the ion current of the plasma flow on the filter current, gas pressure, distance and...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/90954 |
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