2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-98816%22&qt=morelikethis&rows=5
2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-98816%22&qt=morelikethis&rows=5
2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T19:58:48-05:00 DEBUG: Deserialized SOLR response
Plasma potential influence on ion energy Distribution function in ICP source

Plasma potential influence on ion energy Distribution function in ICP source

In this work, the deviation of energy distribution function of energetic ions from the predetermined value in an inductively coupled plasma (ICP) ion gun source is discussed. An abnormal plasma potential increase at an extraction voltage 400 V caused a beam energy shift of up to 50 eV compared to...

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Bibliographic Details
Main Authors: Vozniy, O.V., Yeom, G.Y., Kropotov, A.Yu.
Format: Article
Language:English
Published: Науковий фізико-технологічний центр МОН та НАН України 2007
Series:Физическая инженерия поверхности
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/98816
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2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-98816%22&qt=morelikethis
2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-98816%22&qt=morelikethis
2025-02-23T19:58:48-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T19:58:48-05:00 DEBUG: Deserialized SOLR response

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