Structure, properties and morphology of nanostructured coatings solid Ti-Si-N
The work presents a comparative analysis of results obtained from samples of nanostructured Ti-Si-N coatings. Element composition, defect structure, concentration of elements throughout the depth of coating and morphology of films were studied using the techniques of slow positron beam (SPB),...
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| Date: | 2013 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2013
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| Series: | Физическая инженерия поверхности |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/100310 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure, properties and morphology of nanostructured coatings solid Ti-Si-N/ M.V. Kaverin, B. Zhollybekov // Физическая инженерия поверхности. — 2013. — Т. 11, № 3. — С. 263–269. — Бібліогр.: 19 назв. — англ. |