Effect of increasing surface roughness on sputtering and reflection
In this work, the SDTrimSP-2D code was used for numerical simulation of the interaction of ions with a 2D periodical structure as idealized test system to investigate the influence of surface roughness on sputtering. Sputtering yield and reflection coefficient have been studied as a function of the...
Saved in:
| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2012 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2012
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/109143 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Effect of increasing surface roughness on sputtering and reflection / I. Bizyukov, A. Mutzke, R. Schneider // Вопросы атомной науки и техники. — 2012. — № 6. — С. 111-113. — Бібліогр.: 6 назв. — англ. |