Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials
In the model of nonlocal thermoelastic peak of low-energy ion a formula for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of DC and pulse bias potentials is derived. Calculation of intrinsic stress σ depending on bias potential U in coati...
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| Veröffentlicht in: | Вопросы атомной науки и техники |
|---|---|
| Datum: | 2016 |
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/111764 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Intrinsic stress formation in multi-component coatings produced by plasma ion deposition in modes of DC and pulse bias potentials / A.I. Kalinichenko, S.A. Kozionov, V.E. Strelnitskij // Вопросы атомной науки и техники. — 2016. — № 1. — С. 149-153. — Бібліогр.: 11 назв. — англ. |