Peculiarities of glow modes of argon atmospheric pressure radio-frequency capacitive discharge with isolated electrodes
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in low-current α and highcurrent γ modes are determined experimentally. It is shown that transition from α mode to γ mode occurs through a phase of coexistence of both modes in different parts of the discharge gap....
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| Date: | 2013 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/112185 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Peculiarities of glow modes of argon atmospheric pressure radio-frequency capacitive discharge with isolated electrodes / V.Yu. Bazhenov, V.V. Tsiolko, V.M. Piun, R.Yu. Chaplinskiy, A.I. Kuzmichev // Вопросы атомной науки и техники. — 2013. — № 4. — С. 171-175. — Бібліогр.: 14 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | Glow characteristics of capacitive radio frequency discharge with isolated electrodes in low-current α and highcurrent γ modes are determined experimentally. It is shown that transition from α mode to γ mode occurs through a phase of coexistence of both modes in different parts of the discharge gap. |
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