Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film
Titanium nitride (TiN) films were deposited by the D.C. magnetron sputtering process on a SUS 304 steel substrate. The effect of postdeposition annealing on the microstructure and mechanical properties of thin TiN films was studied in detail using atomic force microscopy, a potentiostat and na...
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| Published in: | Проблемы прочности |
|---|---|
| Date: | 2014 |
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут проблем міцності ім. Г.С. Писаренко НАН України
2014
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/112717 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film / S.C. Her, C.L. Wu // Проблемы прочности. — 2014. — № 2. — С. 66-72. — Бібліогр.: 21 назв. — англ. |