Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2011
• Main Authors: Burbelo, R., Isaiev, M., Kuzmich, A.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2011
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/117708
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation / R. Burbelo, M. Isaiev, A. Kuzmich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 167-169. — Бібліогр.: 4 назв. — англ.

The analysis of photo-thermo-acoustic transformation in materials with the modified properties of a surface layer has been made in this work. Formation of a photoacoustic response in a layered structure of the type “implanted layer + crystalline Si substrate” as a result of its irradiation by one...