Electrical properties of MIS structures with silicon nanoclusters

The theoretical and experimental investigations of electrical properties of the
 Al-SiO₂-( − ncsSi -SiO₂-Si structures grown using high temperature annealing SiOx, x < 2, have been carried out. It has been experimentally found that the Al-SiO₂-( − ncsSi )-SiO₂-Si structures with the t...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2011
Hauptverfasser: Bunak, S.V., Ilchenko, V.V., Melnik, V.P., Hatsevych, I.M., Romanyuk, B.N., Shkavro, A.G., Tretyak, O.V.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2011
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/117722
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Zitieren:Electrical properties of MIS structures with silicon nanoclusters / S.V. Bunak, V.V. Ilchenko, V.P. Melnik, I.M. Hatsevych, B.N. Romanyuk, A.G. Shkavro, O.V. Tretyak // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 241-246. — Бібліогр.: 10 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Bunak, S.V.
Ilchenko, V.V.
Melnik, V.P.
Hatsevych, I.M.
Romanyuk, B.N.
Shkavro, A.G.
Tretyak, O.V.
author_facet Bunak, S.V.
Ilchenko, V.V.
Melnik, V.P.
Hatsevych, I.M.
Romanyuk, B.N.
Shkavro, A.G.
Tretyak, O.V.
citation_txt Electrical properties of MIS structures with silicon nanoclusters / S.V. Bunak, V.V. Ilchenko, V.P. Melnik, I.M. Hatsevych, B.N. Romanyuk, A.G. Shkavro, O.V. Tretyak // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 241-246. — Бібліогр.: 10 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description The theoretical and experimental investigations of electrical properties of the
 Al-SiO₂-( − ncsSi -SiO₂-Si structures grown using high temperature annealing SiOx, x < 2, have been carried out. It has been experimentally found that the Al-SiO₂-( − ncsSi )-SiO₂-Si structures with the tunnel dielectric layer revealed the effect of dynamic memory. Electric properties and parameters of the interface states located between − ncsSi and SiO₂ were studied in detail by measuring of current-voltage, capacitance-voltage, and thermally stimulated current characteristics.
first_indexed 2025-12-07T20:03:50Z
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-12-07T20:03:50Z
publishDate 2011
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Bunak, S.V.
Ilchenko, V.V.
Melnik, V.P.
Hatsevych, I.M.
Romanyuk, B.N.
Shkavro, A.G.
Tretyak, O.V.
2017-05-26T13:09:03Z
2017-05-26T13:09:03Z
2011
Electrical properties of MIS structures with silicon nanoclusters / S.V. Bunak, V.V. Ilchenko, V.P. Melnik, I.M. Hatsevych, B.N. Romanyuk, A.G. Shkavro, O.V. Tretyak // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 241-246. — Бібліогр.: 10 назв. — англ.
1560-8034
PACS 72.20.Ee, 73.40.Qv
https://nasplib.isofts.kiev.ua/handle/123456789/117722
The theoretical and experimental investigations of electrical properties of the
 Al-SiO₂-( − ncsSi -SiO₂-Si structures grown using high temperature annealing SiOx, x < 2, have been carried out. It has been experimentally found that the Al-SiO₂-( − ncsSi )-SiO₂-Si structures with the tunnel dielectric layer revealed the effect of dynamic memory. Electric properties and parameters of the interface states located between − ncsSi and SiO₂ were studied in detail by measuring of current-voltage, capacitance-voltage, and thermally stimulated current characteristics.
This work was supported by Grant №M/90–2010 of Ministry for Education and Science of Ukraine.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Electrical properties of MIS structures with silicon nanoclusters
Article
published earlier
spellingShingle Electrical properties of MIS structures with silicon nanoclusters
Bunak, S.V.
Ilchenko, V.V.
Melnik, V.P.
Hatsevych, I.M.
Romanyuk, B.N.
Shkavro, A.G.
Tretyak, O.V.
title Electrical properties of MIS structures with silicon nanoclusters
title_full Electrical properties of MIS structures with silicon nanoclusters
title_fullStr Electrical properties of MIS structures with silicon nanoclusters
title_full_unstemmed Electrical properties of MIS structures with silicon nanoclusters
title_short Electrical properties of MIS structures with silicon nanoclusters
title_sort electrical properties of mis structures with silicon nanoclusters
url https://nasplib.isofts.kiev.ua/handle/123456789/117722
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AT romanyukbn electricalpropertiesofmisstructureswithsiliconnanoclusters
AT shkavroag electricalpropertiesofmisstructureswithsiliconnanoclusters
AT tretyakov electricalpropertiesofmisstructureswithsiliconnanoclusters