Determination of surface defects by using the wavefront scanner

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2010
• Main Authors: Goloborodko, N.S., Grygoruk, V.I., Kurashov, V.N., Podanchuk, D.V., Goloborodko, A.A., Kotov, M.M.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2010
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/117744
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Determination of surface defects by using the wavefront scanner / N.S. Goloborodko, V.I. Grygoruk, V.N. Kurashov, D.V. Podanchuk, A.A. Goloborodko, M.M. Kotov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 65-69. — Бібліогр.: 10 назв. — англ.

The possibility of changes in the polarization state of the laser beam reflected
 from inhomogeneity with the refractive index gradient is theoretically shown, which
 allows separating the phase shifts related with relief inhomogeneities and local changes
 of the surface refractive index. Modification of the wavefront scanner for analyzing the
 wavefront of the laser beam reflected from the samples’ surface is considered. The main
 idea of the method is to use the focused laser beams with different polarizations for
 illuminating separate areas of the surface. The results of detecting test surfaces with
 different structures by the wavefront scanner are presented.