Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts
We present the results of structural and morphological investigations of
 interactions between phases in the layers of Au-Pd-Ti-Pd-n⁺-GaN contact metallization that appear at rapid thermal annealing (RTA). It is shown that formation of ohmic contact
 occurs in the course of RTA at Т...
Збережено в:
| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Дата: | 2013 |
| Автори: | , , , , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2013
|
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/117817 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, A.V. Kuchuk, T.V. Korostinskaya, A.S. Pilipchuk, V.N. Sheremet, Yu.I. Mazur, M.E. Ware, G.J. Salamo // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2013. — Т. 16, № 4. — С. 313-321. — Бібліогр.: 32 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862708641503641600 |
|---|---|
| author | Sachenko, A.V. Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Klad’ko, V.P. Konakova, R.V. Kuchuk, A.V. Korostinskay, T.V. Pilipchuk, A.S. Sheremet, V.N. Mazur, Yu.I. Ware, M.E. Salamo, G.J. |
| author_facet | Sachenko, A.V. Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Klad’ko, V.P. Konakova, R.V. Kuchuk, A.V. Korostinskay, T.V. Pilipchuk, A.S. Sheremet, V.N. Mazur, Yu.I. Ware, M.E. Salamo, G.J. |
| citation_txt | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, A.V. Kuchuk, T.V. Korostinskaya, A.S. Pilipchuk, V.N. Sheremet, Yu.I. Mazur, M.E. Ware, G.J. Salamo // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2013. — Т. 16, № 4. — С. 313-321. — Бібліогр.: 32 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | We present the results of structural and morphological investigations of
interactions between phases in the layers of Au-Pd-Ti-Pd-n⁺-GaN contact metallization that appear at rapid thermal annealing (RTA). It is shown that formation of ohmic contact
occurs in the course of RTA at Т = 900°C due to formation of titanium nitride. We
studied experimentally and explained theoretically the temperature dependence of
contact resistivity ρс(Т) of ohmic contacts in the 4.2-380 K temperature range. The ρс(Т)
curve was shown to flatten out in the 4.2-50 K range. As temperature grew, ρс decreased
exponentially. The results obtained enabled us to conclude that current flow has field
nature at saturation of ρс(Т) and the thermofield nature in the exponential part of ρс(Т)
curve.
|
| first_indexed | 2025-12-07T17:12:04Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-117817 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T17:12:04Z |
| publishDate | 2013 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Sachenko, A.V. Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Klad’ko, V.P. Konakova, R.V. Kuchuk, A.V. Korostinskay, T.V. Pilipchuk, A.S. Sheremet, V.N. Mazur, Yu.I. Ware, M.E. Salamo, G.J. 2017-05-26T18:58:53Z 2017-05-26T18:58:53Z 2013 Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, A.V. Kuchuk, T.V. Korostinskaya, A.S. Pilipchuk, V.N. Sheremet, Yu.I. Mazur, M.E. Ware, G.J. Salamo // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2013. — Т. 16, № 4. — С. 313-321. — Бібліогр.: 32 назв. — англ. 1560-8034 PACS 73.40.Cg, 73.40.Ns, 85.40.-e https://nasplib.isofts.kiev.ua/handle/123456789/117817 We present the results of structural and morphological investigations of
 interactions between phases in the layers of Au-Pd-Ti-Pd-n⁺-GaN contact metallization that appear at rapid thermal annealing (RTA). It is shown that formation of ohmic contact
 occurs in the course of RTA at Т = 900°C due to formation of titanium nitride. We
 studied experimentally and explained theoretically the temperature dependence of
 contact resistivity ρс(Т) of ohmic contacts in the 4.2-380 K temperature range. The ρс(Т)
 curve was shown to flatten out in the 4.2-50 K range. As temperature grew, ρс decreased
 exponentially. The results obtained enabled us to conclude that current flow has field
 nature at saturation of ρс(Т) and the thermofield nature in the exponential part of ρс(Т)
 curve. The Ukrainian coauthors had a support from the State
 Target Scientific and Technical Program of Ukraine
 “Nanotechnologies and nanomaterials” for 2010-2014. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts Article published earlier |
| spellingShingle | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts Sachenko, A.V. Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Klad’ko, V.P. Konakova, R.V. Kuchuk, A.V. Korostinskay, T.V. Pilipchuk, A.S. Sheremet, V.N. Mazur, Yu.I. Ware, M.E. Salamo, G.J. |
| title | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts |
| title_full | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts |
| title_fullStr | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts |
| title_full_unstemmed | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts |
| title_short | Mechanism of current flow and temperature dependence of contact resistivity in Au-Pd-Ti-Pd-n⁺ -GaN ohmic contacts |
| title_sort | mechanism of current flow and temperature dependence of contact resistivity in au-pd-ti-pd-n⁺ -gan ohmic contacts |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/117817 |
| work_keys_str_mv | AT sachenkoav mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT belyaevae mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT boltovetsns mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT kapitanchuklm mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT kladkovp mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT konakovarv mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT kuchukav mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT korostinskaytv mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT pilipchukas mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT sheremetvn mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT mazuryui mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT wareme mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts AT salamogj mechanismofcurrentflowandtemperaturedependenceofcontactresistivityinaupdtipdnganohmiccontacts |