Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide

For contacts prepared from titanium borides by and nitrides ion-plasma sputtering onto gallium arsenide both formation mechanisms and thermal stability were investigated. We used a combination of structural, secondary-emission, optical and electrophysical methods, such as electronography, X-ray diff...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:1999
Hauptverfasser: Venger, Ye.F., Milenin, V.V., Ermolovich, I.B., Konakova, R.V., Voitsikhovskiy, D.I., Hotovy, I., Ivanov, V. N.
Format: Artikel
Sprache:English
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 1999
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/117946
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide / Ye.F. Venger, V.V. Milenin, I.B. Ermolovich, R.V. Konakova, D.I. Voitsikhovskiy, I. Hotovy, V.N. Ivanov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 124-132. — Бібліогр.: 8 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-117946
record_format dspace
spelling Venger, Ye.F.
Milenin, V.V.
Ermolovich, I.B.
Konakova, R.V.
Voitsikhovskiy, D.I.
Hotovy, I.
Ivanov, V. N.
2017-05-27T16:55:52Z
2017-05-27T16:55:52Z
1999
Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide / Ye.F. Venger, V.V. Milenin, I.B. Ermolovich, R.V. Konakova, D.I. Voitsikhovskiy, I. Hotovy, V.N. Ivanov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 124-132. — Бібліогр.: 8 назв. — англ.
1560-8034
PACS 73.40.Ns, 68.60.Dv
https://nasplib.isofts.kiev.ua/handle/123456789/117946
621.382.2
For contacts prepared from titanium borides by and nitrides ion-plasma sputtering onto gallium arsenide both formation mechanisms and thermal stability were investigated. We used a combination of structural, secondary-emission, optical and electrophysical methods, such as electronography, X-ray diffraction, atomic force microscopy, Auger electron spectroscopy, secondary-ion mass spectrometry, taking photoluminescence spectra and I - V curves. A physical model for contact formation was proposed. According to it, BxGa₁₋xAs (GaNxAs₁₋x) solid solutions are formed at the phase interfaces when titanium borides (nitrides) are deposited. The defects are produced in the semiconductor near-surface regions during heterostructure formation and further heat treatment. The correlation between the physico-chemical interactions at contact interfaces and the contact electrophysical parameters occurs through these defects. The objects of our investigation demonstrated high thermal stability. This was due to their two-layer structure formed by components having well-pronounced antidiffusion properties. As a result, the interdiffusion processes at the phase interfaces are drastically weakened.
This work was partially supported by the Science and Technology Center of Ukraine (Project № 464).
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
spellingShingle Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
Venger, Ye.F.
Milenin, V.V.
Ermolovich, I.B.
Konakova, R.V.
Voitsikhovskiy, D.I.
Hotovy, I.
Ivanov, V. N.
title_short Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
title_full Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
title_fullStr Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
title_full_unstemmed Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
title_sort heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide
author Venger, Ye.F.
Milenin, V.V.
Ermolovich, I.B.
Konakova, R.V.
Voitsikhovskiy, D.I.
Hotovy, I.
Ivanov, V. N.
author_facet Venger, Ye.F.
Milenin, V.V.
Ermolovich, I.B.
Konakova, R.V.
Voitsikhovskiy, D.I.
Hotovy, I.
Ivanov, V. N.
publishDate 1999
language English
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
format Article
description For contacts prepared from titanium borides by and nitrides ion-plasma sputtering onto gallium arsenide both formation mechanisms and thermal stability were investigated. We used a combination of structural, secondary-emission, optical and electrophysical methods, such as electronography, X-ray diffraction, atomic force microscopy, Auger electron spectroscopy, secondary-ion mass spectrometry, taking photoluminescence spectra and I - V curves. A physical model for contact formation was proposed. According to it, BxGa₁₋xAs (GaNxAs₁₋x) solid solutions are formed at the phase interfaces when titanium borides (nitrides) are deposited. The defects are produced in the semiconductor near-surface regions during heterostructure formation and further heat treatment. The correlation between the physico-chemical interactions at contact interfaces and the contact electrophysical parameters occurs through these defects. The objects of our investigation demonstrated high thermal stability. This was due to their two-layer structure formed by components having well-pronounced antidiffusion properties. As a result, the interdiffusion processes at the phase interfaces are drastically weakened.
issn 1560-8034
url https://nasplib.isofts.kiev.ua/handle/123456789/117946
citation_txt Heat tolerance of titanium boride and titanium nitride contacts to gallium arsenide / Ye.F. Venger, V.V. Milenin, I.B. Ermolovich, R.V. Konakova, D.I. Voitsikhovskiy, I. Hotovy, V.N. Ivanov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 124-132. — Бібліогр.: 8 назв. — англ.
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