Optical properties of thin films of titanium with transient layers on them
Within the Beattie spectroellipsometric method, we measured the ellipsometric
 parameters of thin Ті films deposited onto glass substrates by magnetron sputtering in
 argon atmosphere. Measurements were carried out at five angles of incidence with light
 from the visible and...
Gespeichert in:
| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2010 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/118394 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Optical properties of thin films of titanium
 with transient layers on them /V.V. Lendel, O.V. Lomakina, L.Yu. Mel’nychenko, I.A. Shaykevich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 3. — С. 231-234. — Бібліогр.: 9 назв. — англ. |