Optical properties of thin films of titanium with transient layers on them
Within the Beattie spectroellipsometric method, we measured the ellipsometric
 parameters of thin Ті films deposited onto glass substrates by magnetron sputtering in
 argon atmosphere. Measurements were carried out at five angles of incidence with light
 from the visible and...
Saved in:
| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2010 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118394 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Optical properties of thin films of titanium
 with transient layers on them /V.V. Lendel, O.V. Lomakina, L.Yu. Mel’nychenko, I.A. Shaykevich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 3. — С. 231-234. — Бібліогр.: 9 назв. — англ. |