Optical properties of thin films of titanium with transient layers on them
Within the Beattie spectroellipsometric method, we measured the ellipsometric parameters of thin Ті films deposited onto glass substrates by magnetron sputtering in argon atmosphere. Measurements were carried out at five angles of incidence with light from the visible and ultraviolet ranges of th...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2010 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118394 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Optical properties of thin films of titanium with transient layers on them /V.V. Lendel, O.V. Lomakina, L.Yu. Mel’nychenko, I.A. Shaykevich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 3. — С. 231-234. — Бібліогр.: 9 назв. — англ. |