Using ellipsometry methods for depth analyzing the optical disc data layer relief structures
We studied the relief depth of the data layer formed in a glass disk by ion beam etching process with using classical ellipsometry at the constant wavelength 632.8 nm for different angles of incidence. It was found that for 0° and 90° azimuth angles, a pair of ellipsometric parameters Ψ and ∆ is...
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| Date: | 2008 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2008
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| Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118596 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Using ellipsometry methods for depth analyzing the optical disc data layer relief structures / V.G. Kravets, I.V. Gorbov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 1. — С. 11-15. — Бібліогр.: 8 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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nasplib_isofts_kiev_ua-123456789-1185962025-06-03T16:25:25Z Using ellipsometry methods for depth analyzing the optical disc data layer relief structures Kravets, V.G. Gorbov, I.V. We studied the relief depth of the data layer formed in a glass disk by ion beam etching process with using classical ellipsometry at the constant wavelength 632.8 nm for different angles of incidence. It was found that for 0° and 90° azimuth angles, a pair of ellipsometric parameters Ψ and ∆ is sufficient to characterize the changes in light reflection for various structure depths. The depth of optical disc data layer relief structures was estimated via experimental dependences of ellipsometric parameters. The estimated data layer depths were found to be in good agreement with independent tunnelling electron microscopy measurements. 2008 Article Using ellipsometry methods for depth analyzing the optical disc data layer relief structures / V.G. Kravets, I.V. Gorbov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 1. — С. 11-15. — Бібліогр.: 8 назв. — англ. 1560-8034 PACS 42.79.Vb https://nasplib.isofts.kiev.ua/handle/123456789/118596 en Semiconductor Physics Quantum Electronics & Optoelectronics application/pdf Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| language |
English |
| description |
We studied the relief depth of the data layer formed in a glass disk by ion beam
etching process with using classical ellipsometry at the constant wavelength 632.8 nm for
different angles of incidence. It was found that for 0° and 90° azimuth angles, a pair of
ellipsometric parameters Ψ and ∆ is sufficient to characterize the changes in light
reflection for various structure depths. The depth of optical disc data layer relief
structures was estimated via experimental dependences of ellipsometric parameters. The
estimated data layer depths were found to be in good agreement with independent
tunnelling electron microscopy measurements. |
| format |
Article |
| author |
Kravets, V.G. Gorbov, I.V. |
| spellingShingle |
Kravets, V.G. Gorbov, I.V. Using ellipsometry methods for depth analyzing the optical disc data layer relief structures Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Kravets, V.G. Gorbov, I.V. |
| author_sort |
Kravets, V.G. |
| title |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| title_short |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| title_full |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| title_fullStr |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| title_full_unstemmed |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| title_sort |
using ellipsometry methods for depth analyzing the optical disc data layer relief structures |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2008 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/118596 |
| citation_txt |
Using ellipsometry methods for depth analyzing the optical disc data layer relief structures / V.G. Kravets, I.V. Gorbov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 1. — С. 11-15. — Бібліогр.: 8 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT kravetsvg usingellipsometrymethodsfordepthanalyzingtheopticaldiscdatalayerreliefstructures AT gorboviv usingellipsometrymethodsfordepthanalyzingtheopticaldiscdatalayerreliefstructures |
| first_indexed |
2025-11-25T22:33:23Z |
| last_indexed |
2025-11-25T22:33:23Z |
| _version_ |
1849803410583322624 |