Enhanced phenomenological models of ion channeling contribution to doping profiles in crystals
New phenomenological models are proposed to describe the effect of an ordered lattice structure of crystalline targets on the as-implanted doping profiles of low-energy heavy ions. The models account for the channeling kinetics and clarify the effect of bi-directional transitions of ions between r...
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| Published in: | Condensed Matter Physics |
|---|---|
| Date: | 2009 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики конденсованих систем НАН України
2009
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/119771 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Enhanced phenomenological models of ion channeling contribution to doping profiles in crystals / M.I. Bratchenko, S.V. Dyuldya, A.S. Bakai // Condensed Matter Physics. — 2009. — Т. 12, № 1. — С. 35-49. — Бібліогр.: 44 назв. — англ. |