Optoelectronic sensor of longitudinal and angular displacements
In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving he...
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| Дата: | 1999 |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Optoelectronic sensor of longitudinal and angular displacements / A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 71-73. — Бібліогр.: 5 назв. — англ. |
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nasplib_isofts_kiev_ua-123456789-1198692025-02-09T09:53:42Z Optoelectronic sensor of longitudinal and angular displacements Dlugaszek, A. Jabczynski, J. Janucki, J. Skrzeczanowski, W. In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving head. An accuracy of displacement measurements depends on parameters of a beam illuminating a surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also presented. 1999 Article Optoelectronic sensor of longitudinal and angular displacements / A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 71-73. — Бібліогр.: 5 назв. — англ. 1560-8034 PACS 07.07.D, 42.79.P,Q https://nasplib.isofts.kiev.ua/handle/123456789/119869 en Semiconductor Physics Quantum Electronics & Optoelectronics application/pdf Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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English |
| description |
In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving head. An accuracy of displacement measurements depends on parameters of a beam illuminating a surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also presented. |
| format |
Article |
| author |
Dlugaszek, A. Jabczynski, J. Janucki, J. Skrzeczanowski, W. |
| spellingShingle |
Dlugaszek, A. Jabczynski, J. Janucki, J. Skrzeczanowski, W. Optoelectronic sensor of longitudinal and angular displacements Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Dlugaszek, A. Jabczynski, J. Janucki, J. Skrzeczanowski, W. |
| author_sort |
Dlugaszek, A. |
| title |
Optoelectronic sensor of longitudinal and angular displacements |
| title_short |
Optoelectronic sensor of longitudinal and angular displacements |
| title_full |
Optoelectronic sensor of longitudinal and angular displacements |
| title_fullStr |
Optoelectronic sensor of longitudinal and angular displacements |
| title_full_unstemmed |
Optoelectronic sensor of longitudinal and angular displacements |
| title_sort |
optoelectronic sensor of longitudinal and angular displacements |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
1999 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/119869 |
| citation_txt |
Optoelectronic sensor of longitudinal and angular displacements / A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 71-73. — Бібліогр.: 5 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT dlugaszeka optoelectronicsensoroflongitudinalandangulardisplacements AT jabczynskij optoelectronicsensoroflongitudinalandangulardisplacements AT januckij optoelectronicsensoroflongitudinalandangulardisplacements AT skrzeczanowskiw optoelectronicsensoroflongitudinalandangulardisplacements |
| first_indexed |
2025-11-25T12:22:41Z |
| last_indexed |
2025-11-25T12:22:41Z |
| _version_ |
1849764995487760384 |
| fulltext |
71© 1999, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
Semiconductor Physics, Quantum Electronics & Optoelectronics. 1999. V. 2, N 3. P. 71-73.
PACS 07.07.D, 42.79.P,Q
Optoelectronic sensor of longitudinal and
angular displacements
A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski
Institute of Optoelectronics, Military University of Technology,
2 Kaliskiego str. 00-908 Warsaw, POLAND, tel. (48 22) 6859678, fax (48 22) 6668950,
e-mail: jabczy@wat.waw.pl, wskrzecz@wat.waw.pl
Abstract. In the sensor a triangulation method of displacement measurement has been used. A method
of sensor calibration using interferometric distance measurements has been elaborated. Linearity and
resolution investigations have been performed for different parameter sets of sensor transmitting-receiv-
ing head. An accuracy of displacement measurements depends on parameters of a beam illuminating a
surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a
signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also
presented.
Keywords: optoelectronic sensor, position-sensitive detector, longitudial displacement, angular dis-
placement
Paper received 08.09.99; revised manuscript received 30.09.99; accepted for publication 04.10.99.
1. Introduction
Measurements of small angular deviations are carried out
using interferometry methods as a rule [1]. Such systems
(see, for example, [2]) allow displacement measurements
only in one plane with 1 µrad accuracy. These measure-
ments can be performed also using «geometrical» method,
consisting in measurements of X, Y positions of point im-
age in a lens focal plane next divided by focal length f.
A triangulation method is one of contactless methods of
displacement measurements [3]. In this method a moving
object is illuminated by light beam at a certain angle to ob-
servation axis. An image of a light spot illuminating mov-
ing surface of an object changes its position at position sen-
sitive detector (PSD). A linearized, approximate depend-
ence between displacement Z and a position of a spot im-
age at a detector XA is given by (1):
αsin
00
0 ⋅
−
⋅≅
fZ
f
ZX A , (1)
where: Z is a value of an object displacement from its initial
position Z0, α is the angle between light beam illuminating
an object and observation object, f0 is a focal length of an
optical system of a receiving PSD part.
A range of displacement measurement depends on a size
of PSD photosensitive area and geometric parameters of
optical systems of transmitting and receiving parts of a sen-
sor. The range of linearity of dependence (1) is determined
by a value of an angle α as well as by readout errors of a
position of spot image on PSD surface (nonlinearity of de-
tector characteristics). Next a resolution of displacement
measurement depends on signal-to-noise ratio of a signal in
a receiving system of a sensor and on resolution of readout
system of output electrical signal.
2. Principle of operation of monolithic
PSD detector
A PSD detector used in a laboratory model is based on
monolithic silicon p-i-n photodiode (Fig.1). Upper layer of
a doped semiconductor has two deposited readout electrodes.
A polarising electrode is deposited on a bottom layer. Light
scattered on object surface is collected by optical system
and then incidences on detector surface. In the photodiode
i layer a conversion of light radiation into electric current
flowing from polarising electrode to readout electrodes
occurs.Owing to resistance homogeneity of upper layer of
a detector, the values of photocurrents reaching readout elec-
trodes are inversely proportional to a distance between place
of radiation incidencing on detector surface and a readout
electrode (Fig.1). That is why a position of a spot image on
PSD surface is given by dependence (2) like that in [2]:
( )21,2 IIYLX nA ⋅= , (2)
A. Dlugaszek et al.: Optoelectronic sensor of longitudinal and angular displacements
72 SQO, 2(3), 1999
where: XA is a spot image position on PSD surface, I1 and I2
are photocurrents at first and second readout electrodes, re-
spectively, L is a length of photosensitive surface of PSD de-
tector, Yn is a normalising function given by dependence (3):
( )
xy
xy
yxYn +
−=, . (3)
Readout resolution of a position of a light spot on detector
surface depends on PSD intrinsic noise (thermal noise, shot
noise) and on optical noise reaching PSD surface. In order
to improve sensor resolution one can use modulation of
intensity of a beam illuminating moving object and
synchronous reception of radiation scattered on its surface.
Monolithic PSD detectors have many advantages in
comparison with such discrete PSD’s as CCD [4] or
photodiode linear detectors. These are as follows:
§ analog, continuous measurement of a position of
radiation beam illuminating the surface,
§ resolution of position readout,
§ high speed of pulse response,
§ simple system of electronic processing of a signal.
3. Sensor calibration
A calibration of an angular deviation sensor is performed if
a value of a coefficient defining a connection between volt-
age signals from a signal analog processor and angular de-
viations of radiation beam illuminating PSD surface is found.
Measurements have been carried out using laboratory set-
up shown in Fig.2. He-Ne laser with a UPF beam expander
is a radiation source in this set-up.Light beam deviated by
means of mirror M is splitted into two beams in a beam
splitter DW. One beam is directed to PSD-2D detection path,
while the second one is directed into LBA 100A system for
registration of spatial distributions [5]. The use of UFP al-
lows one to achieve a high spatial stability of a light beam.
Measurements of spatial stability showed that determining
of a beam center position with 1 µm accuracy is possible,
which for focal length f = 300 mm gives 3 mrad.
Calibrations were based on simultaneous measurements
of angular deviations in different directions using LBA 100A
system and changes of output voltage signals from the APS
processor of the sensor. Calibration curve is shown in Fig.3.
Correlation coefficient r = 0.8 between LBA measurements
and APS voltage signals was found. Mean square deviation
of nonlinearity was about 8%.Nonlinearity of a calibration
curve, shown in Fig.3, defined as a deviation from the
straight line approximating the dependence amounts in this
case is 3.4%. The 0.5 µm resolution for displacement meas-
urement has been achieved for the measurement range ∆Z.
It depends on geometrical parameters of a sensor system,
ratio of a light spot diameter to sensor size, and on light and
electronic noise. In the case of large displacement range, a
measurement nonlinearity (Fig.4) is much higher than in
former case and amounts to 24%. It is caused by nonlinearity
of the method itself (system responsivity varies according
to displacement change from 0.02 up to 0.06 V/mm).
4. Measurements of angular displacements
Preliminary measurements of angular displacements have
been carried out using arrangement shown in Fig.5. Slide
shifts were measured using HP 5526A interferometer. Po-
larizing beam splitter of the interferometer was attached in
a lathe chuck, while prism mirror together with transmit-
ting head GN of the sensor were fasten to the lathe slide. The
TD receiving system of a sensor was set on the lathe frame.
The stand in Fig.5 allows one to simultaneously measu linear-
ity and angular displacements of lathe slide shift.
Fig.1. A structure of monolithic PSD detector
Fig.2. A scheme of a laboratory stand for sensor calibration.
p layer
i layer
n layer
hν
Anode 2
Cathode
Anode 1
I 2 I 1
UFP
P
F
He-Ne
Laser
CCD-2D
LBA
Monitor
f1
f 2DW
PSD-2D
APS
U x
U y
Dq
M
Fig.3. Results of sensor calibration.
2.5
1.5
0.5
focal length f [mm] = 62
sensitivity [mrad/V] = 6.15
measurement error [%] = 8
3
2
1
0
0 0.1 0.2 0.3 0.4 0.5
Voltage, V
A
ng
le
,
m
ra
d
focal length f, mm = 62
sensitivity, mrad/V = 6.15
measurement error, % = 8
A. Dlugaszek et al.: Optoelectronic sensor of longitudinal and angular displacements
73SQO, 2(3), 1999
About 2 µrad spatial stability of GN beam was found.
Both the spatial stability of GN beam and APS resolution
effect on the total uncertainty of an angular deviation meas-
urement, which amounted to about 10 µrad. Measurement
of linear slide shift makes a simultaneous calibration of lon-
gitudinal lathe shift scale possible. Uncertainty of this cali-
bration is 1µm. Results of angular deviation measurements
are shown in Fig.6.
50
0
40
0
40
0
40
0
30
0
20
0
10
0
0
Z, m
m
X , mrad
s
Y
,
m
r
a
d
g
0.12
0.08
0.04
0
-0.04
-0.08
-0.12
Fig.6. Diagram of angular deviations Yg versus shift Z.
Fig.5. Scheme of a stand for measurements of uncertainties of TUM 25A
lathe slide shifts.
-250 -200 -150 -100 -50 0 50 100 150 200 250
Z, mm
Y
, V
10
8
6
4
2
0
-2
-4
-6
-8
-10
Fig.4. Calibration curve F = f (Z) for the case of large displacement range.
Conclusions
A concept of the sensor of angular deviations was tested in
laboratory and tool-room conditions. It seems, that the pre-
sented sensor fulfils operational requirements for industrial
control instruments. Changes of a focal length in a receiv-
ing system of the sensor enable to have different measure-
ment ranges of angular deviations in the investigated ob-
ject. A high influence of optical noise on measurement reso-
lution is a main disadvantage of the presented version of the
sensor. Modulation of GN radiation and synchronous de-
tection of optical signal used for reduction of optical noise
should be of destination solution. Application of computer
for statistical analysis in real time should ensure further im-
provement in sensor abilities.
References
1. K.Holejko, «Interferencyjne metody pomiaru przemieszczen i kata»,
V Krajowa Szkola Optoelektroniki, Waplewo, 1991, «Metrologia
Laserowa», (in Polish), part. II, pp.53-74
2. Hewlett-Packard Co, «Laser Measurement System 5526A»
3. M.Buzinski, A.Levine, W.H.Stevenson, «Laser triangulation range sen-
sors: A study of performance limitations», J.of Las. Appl., pp. 29-36,
1992
4. Hamamatsu Technical Data, «Large Area PSD Series», 1993
5. «Laser Beam Analyzer LBA 100A», Operator�s Manual
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