On a doped transition layer in the space charge region of Schottky contact

A technique is proposed for estimation of maximal thickness of a doped semiconductor transition layer in a Schottky contact. It is based on taking spectral curves of transverse photovoltage. It is shown that in gallium arsenide crystal with starting impurity concentration of 10¹⁶ cm-³, a layer with...

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Published in:Semiconductor Physics Quantum Electronics & Optoelectronics
Date:2002
Main Author: Shekhovtsov, L.V.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2002
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/121338
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:On a doped transition layer in the space charge region of Schottky contact / L.V. Shekhovtsov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 403-405. — Бібліогр.: 8 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Shekhovtsov, L.V.
author_facet Shekhovtsov, L.V.
citation_txt On a doped transition layer in the space charge region of Schottky contact / L.V. Shekhovtsov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 403-405. — Бібліогр.: 8 назв. — англ.
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container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description A technique is proposed for estimation of maximal thickness of a doped semiconductor transition layer in a Schottky contact. It is based on taking spectral curves of transverse photovoltage. It is shown that in gallium arsenide crystal with starting impurity concentration of 10¹⁶ cm-³, a layer with doping level of 10¹⁷ cm-³ and maximal thickness of 4 nm may exist in the space-charge region near the interface of the TiB₂-GaAs structure. At impurity concentration in the transition layer about and over 101¹⁸ cm-³, its thickness goes down, and it shows up as individual inclusions in the GaAs lattice. The total area of such inclusions at the metal-semiconductor interface does not exceed 1 % that of contact. In actual structures the transition layer is a superposition of layers and inclusions, with impurity concentration of 10¹⁷ cm-³ or more and thickness below 4 nm.
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-12-07T19:30:22Z
publishDate 2002
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Shekhovtsov, L.V.
2017-06-14T07:37:08Z
2017-06-14T07:37:08Z
2002
On a doped transition layer in the space charge region of Schottky contact / L.V. Shekhovtsov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 403-405. — Бібліогр.: 8 назв. — англ.
1560-8034
PACS: 73.30.+y
https://nasplib.isofts.kiev.ua/handle/123456789/121338
A technique is proposed for estimation of maximal thickness of a doped semiconductor transition layer in a Schottky contact. It is based on taking spectral curves of transverse photovoltage. It is shown that in gallium arsenide crystal with starting impurity concentration of 10¹⁶ cm-³, a layer with doping level of 10¹⁷ cm-³ and maximal thickness of 4 nm may exist in the space-charge region near the interface of the TiB₂-GaAs structure. At impurity concentration in the transition layer about and over 101¹⁸ cm-³, its thickness goes down, and it shows up as individual inclusions in the GaAs lattice. The total area of such inclusions at the metal-semiconductor interface does not exceed 1 % that of contact. In actual structures the transition layer is a superposition of layers and inclusions, with impurity concentration of 10¹⁷ cm-³ or more and thickness below 4 nm.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
On a doped transition layer in the space charge region of Schottky contact
Article
published earlier
spellingShingle On a doped transition layer in the space charge region of Schottky contact
Shekhovtsov, L.V.
title On a doped transition layer in the space charge region of Schottky contact
title_full On a doped transition layer in the space charge region of Schottky contact
title_fullStr On a doped transition layer in the space charge region of Schottky contact
title_full_unstemmed On a doped transition layer in the space charge region of Schottky contact
title_short On a doped transition layer in the space charge region of Schottky contact
title_sort on a doped transition layer in the space charge region of schottky contact
url https://nasplib.isofts.kiev.ua/handle/123456789/121338
work_keys_str_mv AT shekhovtsovlv onadopedtransitionlayerinthespacechargeregionofschottkycontact