Carbon nanowalls in field emission cathodes

• Datum: 2017
• Hauptverfasser: Belyanin, А.F., Borisov, V.V., Daghetsyan, S.A., Evlashin, S.A., Pilevsky, A.A., Samorodov, V.A.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
• Schriftenreihe: Технология и конструирование в электронной аппаратуре
• Schlagworte: Материалы электроники
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/130112
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Carbon nanowalls in field emission cathodes / А.F. Belyanin, V.V. Borisov, S.A. Daghetsyan, S.A. Evlashin, A.A. Pilevsky, V.A. Samorodov // Технология и конструирование в электронной аппаратуре. — 2017. — № 6. — С. 34-43. — Бібліогр.: 17 назв. — англ.

The carbon nanowall (CNW) layers were grown from a gas mixture of hydrogen and methane, activated by a DC glow discharge, on Si substrates (Si/CNW layered structure). The second layer of CNW was grown either on the first layer (Si/CNW/CNW structure) or on Ni or NiO films deposited on the first CNW layer (Si/CNW/Ni/CNW and Si/CNW/NiO/CNW structures). The composition and structure of the resulting layered structures were studied using scanning electron microscopy, Raman spectroscopy, and X-ray diffractometry. It was found that annealing of Si/CNW structure in vacuum, growing of the second CNW layer on Si/CNW, as well as deposition of Ni or NiO films prior to the growing of the second CNW layer improve functional properties of field emission cathodes based on the electron-emitting CNW layers.