Phase composition, structure and stress state of magnetron sputtered W-Ti condensates
The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the...
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| Veröffentlicht in: | Functional Materials |
|---|---|
| Datum: | 2006 |
| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
НТК «Інститут монокристалів» НАН України
2006
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/135072 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. |