APA (7th ed.) Citation

Semenov, A., Lopin, A., Puzikov, V., & Muto, S. (2005). Ion plasma deposition and optical properties of SiC films. Functional Materials.

Chicago Style (17th ed.) Citation

Semenov, A.V, A.V Lopin, V.M Puzikov, and Sh Muto. "Ion Plasma Deposition and Optical Properties of SiC Films." Functional Materials 2005.

MLA (8th ed.) Citation

Semenov, A.V, et al. "Ion Plasma Deposition and Optical Properties of SiC Films." Functional Materials, 2005.

Warning: These citations may not always be 100% accurate.