Features of synthesis of Ti-Si-N coatings by condensation of vacuum arc plasma with a composite cathode
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| Published in: | Functional Materials |
|---|---|
| Date: | 2011 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2011
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/135442 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Features of synthesis of Ti-Si-N coatings by condensation of vacuum arc plasma with a composite cathode / I.I. Aksenov, V.A. Belous, Yu.A. Zadneprovskiy, N.S. Lomino, O.V. Sobol // Functional Materials. — 2011. — Т. 18, № 2. — С. 266-273. — Бібліогр.: 17 назв. — англ. |