Features of synthesis of Ti-Si-N coatings by condensation of vacuum arc plasma with a composite cathode

• Published in: Functional Materials
• Date: 2011
• Main Authors: Aksenov, I.I., Belous, V.A., Zadneprovskiy, Yu.A., Lomino, N.S., Sobol, O.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2011
• Subjects: Technology
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/135442
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Features of synthesis of Ti-Si-N coatings by condensation of vacuum arc plasma with a composite cathode / I.I. Aksenov, V.A. Belous, Yu.A. Zadneprovskiy, N.S. Lomino, O.V. Sobol // Functional Materials. — 2011. — Т. 18, № 2. — С. 266-273. — Бібліогр.: 17 назв. — англ.