Structure and stress state of ion-plasma hafnium condensates
The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in t...
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| Published in: | Functional Materials |
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| Date: | 2007 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
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НТК «Інститут монокристалів» НАН України
2007
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/136491 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862632398242447360 |
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| author | Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| author_facet | Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| citation_txt | Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in the α-Hf films and the value of crystal lattice periods have been determined by X-ray strain measurement.
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| first_indexed | 2025-11-30T12:54:08Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-136491 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-11-30T12:54:08Z |
| publishDate | 2007 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. 2018-06-16T13:04:54Z 2018-06-16T13:04:54Z 2007 Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/136491 The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in the α-Hf films and the value of crystal lattice periods have been determined by X-ray strain measurement. en НТК «Інститут монокристалів» НАН України Functional Materials Structure and stress state of ion-plasma hafnium condensates Структура та напружений стан іонно-плазмових конденсатів гафнію Article published earlier |
| spellingShingle | Structure and stress state of ion-plasma hafnium condensates Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| title | Structure and stress state of ion-plasma hafnium condensates |
| title_alt | Структура та напружений стан іонно-плазмових конденсатів гафнію |
| title_full | Structure and stress state of ion-plasma hafnium condensates |
| title_fullStr | Structure and stress state of ion-plasma hafnium condensates |
| title_full_unstemmed | Structure and stress state of ion-plasma hafnium condensates |
| title_short | Structure and stress state of ion-plasma hafnium condensates |
| title_sort | structure and stress state of ion-plasma hafnium condensates |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/136491 |
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