Structure and stress state of ion-plasma hafnium condensates
The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in t...
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| Опубліковано в: : | Functional Materials |
|---|---|
| Дата: | 2007 |
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2007
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/136491 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
nasplib_isofts_kiev_ua-123456789-136491 |
|---|---|
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dspace |
| spelling |
Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. 2018-06-16T13:04:54Z 2018-06-16T13:04:54Z 2007 Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/136491 The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in the α-Hf films and the value of crystal lattice periods have been determined by X-ray strain measurement. en НТК «Інститут монокристалів» НАН України Functional Materials Structure and stress state of ion-plasma hafnium condensates Структура та напружений стан іонно-плазмових конденсатів гафнію Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Structure and stress state of ion-plasma hafnium condensates |
| spellingShingle |
Structure and stress state of ion-plasma hafnium condensates Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| title_short |
Structure and stress state of ion-plasma hafnium condensates |
| title_full |
Structure and stress state of ion-plasma hafnium condensates |
| title_fullStr |
Structure and stress state of ion-plasma hafnium condensates |
| title_full_unstemmed |
Structure and stress state of ion-plasma hafnium condensates |
| title_sort |
structure and stress state of ion-plasma hafnium condensates |
| author |
Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| author_facet |
Vus, A.S. Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
| publishDate |
2007 |
| language |
English |
| container_title |
Functional Materials |
| publisher |
НТК «Інститут монокристалів» НАН України |
| format |
Article |
| title_alt |
Структура та напружений стан іонно-плазмових конденсатів гафнію |
| description |
The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in the α-Hf films and the value of crystal lattice periods have been determined by X-ray strain measurement.
|
| issn |
1027-5495 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/136491 |
| citation_txt |
Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. |
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