Ellipsometric evidence of CoSi₂ formation in Co/Si multilayer induced by thermal annealing

• Veröffentlicht in: Functional Materials
• Datum: 2005
• Hauptverfasser: Kudryavtsev, Y.V., Lee, Y.P., Hyun, Y.H., Pavlova, E.P., Makogon, Y.N.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: НТК «Інститут монокристалів» НАН України 2005
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/137685
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Ellipsometric evidence of CoSi₂ formation in Co/Si multilayer induced by thermal annealing / Y.V. Kudryavtsev, Y.P. Lee, Y.H. Hyun, E.P. Pavlova, Y.N. Makogon // Functional Materials. — 2005. — Т. 12, № 2. — С. 366-370. — Бібліогр.: 18 назв. — англ.

The work aim is to demonstrate the potential of the spectroscopic ellipsometry (SE) approach to study the solid state reactions, both spontaneous and/or induced by thermal annealing, in (3.0 nm Co / 10.6 nm Si)₂₀ multilayered film (MLF). The regions with a stoichiometry close to Co₂Si are supposed...