The correlation between film structure and surface temperature

• Published in: Functional Materials
• Date: 2009
• Main Authors: Shaginyan, L.R., Belousov, I.V., Sedlyar, A.G.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2009
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/138930
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The correlation between film structure and surface temperature // L.R. Shaginyan, I.V. Belousov, A.G. Sedlyar // Functional Materials. — 2009. — Т. 16, № 4. — С. 384-389. — Бібліогр.: 11 назв. — англ.

The structure of metal films deposited from fluxes of energetic and thermalized sputtered atoms has been studied in detail. The growth surface temperature Tsurf developing during the condensation of sputtered atoms has been measured by two independent techniques. Variations in the film structure fro...