Magnetron sputtered coatings of AlN-TiCrB₂ system

• Published in: Functional Materials
• Date: 2009
• Main Authors: Panasyuk, A.D., Podchernyaeva, I.A., Neshpor, I.P., Gawalek, W., Ivanov, V.N.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2009
• Subjects: Technology
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/138944
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Magnetron sputtered coatings of AlN-TiCrB₂ system // A.D. Panasyuk, I.A. Podchernyaeva, I.P. Neshpor, W. Gawalek, V.N. Ivanov // Functional Materials. — 2009. — Т. 16, № 4. — С. 492-497. — Бібліогр.: 8 назв. — англ.

Wear and corrosion resistant coatings have been obtained by HF magnetron sputtering of an AlN-TiCrB₂ target (prepared by powder metallurgy technique) on Si, Al₂O₃ and GaAs single crystals. The coatings are characterized by ultra dispersed structure and a considerable high-temperature oxidation resis...