Influence of Si on microstructure and mechanical properties of TiAISiN hard thin films
Structural and mechanical properties of nanocomposite TiAI(Si)N thin films prepared using arc-plasma PVD deposition technique on WC-Co substrates have been characterized by X-ray diffraction and nanoindentation. TEM have been used to study the microstructure of thin films, in order to understand the...
Saved in:
| Date: | 2004 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2004
|
| Series: | Functional Materials |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/139468 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Influence of Si on microstructure and mechanical properties of TiAISiN hard thin films / O.I. Nakonechna, M.I. Zakharenko // Functional Materials. — 2004. — Т. 11, № 3. — С. 541-545. — Бібліогр.: 17 назв. — англ. |