Structure changes in nickel on silicon nano-layers under vacuum ultraviolet irradiation

• Published in: Functional Materials
• Date: 2006
• Main Authors: Mikhailov, I.F., Borisova, S.S., Fomina, L.P., Malykhin, S.V., Babenko, I.N.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2006
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/139961
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Structure changes in nickel on silicon nano-layers under vacuum ultraviolet irradiation / I.F. Mikhailov, S.S. Borisova, L.P. Fomina, S.V. Malykhin, I.N. Babenko // Functional Materials. — 2006. — Т. 13, № 1. — С. 85-89. — Бібліогр.: 7 назв. — англ.

The structure changes in nickel-on-silicon systems due to vacuum ultraviolet irradiation (VUV) have been studied using the X-ray reflectometry. An ultra-thin (1 to 2 nm) layer (of the density ρ = 3.2 to 3.4 g/cm³ at VUV wavelength λ = 120 nm and 2.1 to 2.6 g/cm³ at λ = 180 nm) has been revealed...