Phase formation and crystallization of films deposited by pulse laser sputtering of chromium in oxygen atmosphere
Effects of the substrate temperature Tₛ (20-420 ℃) and the oxygen pressure in the evaporation chamber Р(О₂) (10⁻⁵-10⁻² Torr) on the structure and phase composition of films obtained by pulse laser sputtering of a chromium target have been studied by electron microscopy (using the...
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| Published in: | Functional Materials |
|---|---|
| Date: | 2006 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2006
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/140069 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Phase formation and crystallization of films deposited by pulse laser sputtering of chromium in oxygen atmosphere / A.G. Bagmut, S.N. Grigorov, V.A. Zhuchkov, V.Yu. Kolosov, V.M. Kosevich, G.P. Nikolaichuk // Functional Materials. — 2006. — Т. 13, № 2. — С. 206-213. — Бібліогр.: 8 назв. — англ. |